Ni/Cr thin film depth profile standard

Application
Standard Reference Material NIST2135C is intended for use in the calibration of sputtered depth scales and erosion rates in surface analysis. Its periodic structure, containing eight well-defined metal/metal interfaces, allows for precise calibration at various depths.
Features and Benefits
The total certified thickness for Chromium (Cr) and Nickel (Ni) single element layer-to-layer uniformity, bilayer uniformity (periodicity) and single layer thickness are expressed in units of mass/area and determined by XRF and ICP using a gravimetrically calibrated reference.
Expiration details and instructions for use, storage and handling are provided on the NIST certificate.
General description
Each unit of Ni/Cr thin film depth profile standard (SRM) contains nine alternating metal thin-film layers, including five layers of pure chromium and four of pure nickel, on a polished silicon (100) substrate. These layers have nominal thicknesses of 57 nm for Cr and 56 nm for Ni. The area of the specimen is certified and determined by the full width of the substrate (1.0 cm) and a length of 2.0 cm, centered on the 2.54 cm length of the substrate. For more information, please refer to the COA and SDS.
SRM 2135C_cert
SRM 2135C_SDS

Other Notes
Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Nickel (Ni), Chromium (Cr)

See certificate for values and more details at nist.gov/SRM.
Legal Information
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